DEVICE FOR HANDLING SUBSTRATES INSIDE AND OUTSIDE A CLEAN ROOM

A device ( 10 ) for handling substrates ( 11 ) inside and outside a clean room ( 15 ) is provided with a locking transfer device ( 17 ), by which means a substrate cassette ( 12 ) that is accommodated in a box ( 13 ) in clean-room conditions can be removed from or placed in said box ( 13 ); and with...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	SCHMUTZ, WOLFGANG, GENTISCHER, JOSEF
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS CONVEYING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HANDLING THIN OR FILAMENTARY MATERIAL PACKING PERFORMING OPERATIONS PNEUMATIC TUBE CONVEYORS SEMICONDUCTOR DEVICES SHOP CONVEYOR SYSTEMS STORING TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING TRANSPORTING
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	A device ( 10 ) for handling substrates ( 11 ) inside and outside a clean room ( 15 ) is provided with a locking transfer device ( 17 ), by which means a substrate cassette ( 12 ) that is accommodated in a box ( 13 ) in clean-room conditions can be removed from or placed in said box ( 13 ); and with a first handling device ( 51 ), by which means the substrates ( 11 ) can be placed in or removed from the cassette ( 12 ). According to the invention, a storage area ( 20 ) for a plurality of cassette boxes ( 13 ) is positioned on or above the clean room ( 15 ) and the locking transfer device ( 17 ) is provided between the storage area ( 20 ) and the clean room ( 15 ), so that various work and production steps can be combined in such a way as to save space.