IMPROVED ALIGNMENT OF A THERMAL FIELD EMISSION ELECTRON SOURCE AND APPLICATION IN A MICROCOLUMN

An electron-beam microcolumn alignment method and system in situ includes a split suppressor cap for a miniature Schottky electron or other field emission source. The split suppressor cap is segmented into four or more electrically separate electrode elements, which are independently driven and cont...

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Bibliographische Detailangaben
Hauptverfasser: CHANG, TAI-HON, PHILIP, KIM,, H., S, MURAY, L., P
Format: Patent
Sprache:eng ; fre ; ger
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