IMPROVED ALIGNMENT OF A THERMAL FIELD EMISSION ELECTRON SOURCE AND APPLICATION IN A MICROCOLUMN

IMPROVED ALIGNMENT OF A THERMAL FIELD EMISSION ELECTRON SOURCE AND APPLICATION IN A MICROCOLUMN

An electron-beam microcolumn alignment method and system in situ includes a split suppressor cap for a miniature Schottky electron or other field emission source. The split suppressor cap is segmented into four or more electrically separate electrode elements, which are independently driven and cont...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: CHANG, TAI-HON, PHILIP, KIM,, H., S, MURAY, L., P
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
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Beschreibung
Zusammenfassung:An electron-beam microcolumn alignment method and system in situ includes a split suppressor cap for a miniature Schottky electron or other field emission source. The split suppressor cap is segmented into four or more electrically separate electrode elements, which are independently driven and controlled by separate deflection voltages to scan the electron beam without requiring mechanical movement.