Vacuum processing apparatus and semiconductor manufacturing line using the same

A vacuum processing apparatus is composed of a cassette block (1) and a vacuum processing block (2). The cassette block has a cassette table for mounting a plurality of cassettes (12A, etc) containing a sample and an atmospheric transfer means (9). The vacuum processing block has a plurality of proc...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	YOSHIOKA, KEN, SORAOKA, MINORU, KAWASAKI, YOSHINAO
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS CONVEYING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HANDLING THIN OR FILAMENTARY MATERIAL PACKING PERFORMING OPERATIONS PNEUMATIC TUBE CONVEYORS SEMICONDUCTOR DEVICES SHOP CONVEYOR SYSTEMS STORING TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING TRANSPORTING
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	A vacuum processing apparatus is composed of a cassette block (1) and a vacuum processing block (2). The cassette block has a cassette table for mounting a plurality of cassettes (12A, etc) containing a sample and an atmospheric transfer means (9). The vacuum processing block has a plurality of processing chambers (6,7) for performing vacuum processing to the sample and a vacuum transfer means (10) for transferring the sample. Both of the plan views of the cassette block and the vacuum processing block are nearly rectangular, and the width of the cassette block is designed larger than the width of the vacuum processing block, and the plan view of the vacuum processing apparatus is formed in an L-shape or a T-shape.