Method and apparatus for supplying electricity uniformly to a workpiece

The present invention relates to a device that supplies electricity to a substrate. In one embodiment, the device includes multiple contacts (56), a current sensor, and a current regulator (250). The current sensor is attached to each of the plurality of contacts to sense their electric current. A c...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	KUMAR, ANANDA H, OLGADO, DONALD J, LEON, RICARDO, CLINTON, JON, STEVENS, JOSEPH J, SHAMOUILIAN, SHAMOUIL
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	APPARATUS THEREFOR BASIC ELECTRIC ELEMENTS CHEMISTRY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROFORMING ELECTROLYTIC OR ELECTROPHORETIC PROCESSES METALLURGY PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTIONOF COATINGS SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	The present invention relates to a device that supplies electricity to a substrate. In one embodiment, the device includes multiple contacts (56), a current sensor, and a current regulator (250). The current sensor is attached to each of the plurality of contacts to sense their electric current. A current regulator (250) controls current applied to each of the multiple contacts (56) in response to the current sensor. In another embodiment, a compliant ridge is formed about the periphery of each contact to seal the contact from undesired chemicals.