CATHODE ASSEMBLY CONTAINING AN ELECTROSTATIC CHUCK FOR RETAINING A WAFER IN A SEMICONDUCTOR WAFER PROCESSING SYSTEM

A cathode assembly having a pedestal and a detachable susceptor. Various contact assemblies containing a canted spring are utilized to make electrical connection between the pedestal and detachable susceptor. The canted spring has coils that are tilted in one direction and joined end to end to form...

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Bibliographische Detailangaben
Hauptverfasser:	SATITPUNWAYCHA, PETER, SUBRAMANI, ANANTHA, GRISTI, RAYMOND, HAUSMANN, GILBERT, STIMSON, BRADLEY, O, LU, CHIA-AU BILL, SUGARMAN, MICHAEL, N, RINGOR, LAWRANCE, A
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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Beschreibung
Zusammenfassung:	A cathode assembly having a pedestal and a detachable susceptor. Various contact assemblies containing a canted spring are utilized to make electrical connection between the pedestal and detachable susceptor. The canted spring has coils that are tilted in one direction and joined end to end to form a doughnut shape. Such a spring creates multiple parallel self-loading electrical connections via the turns of the spring. The turns act like electrical wires to ensure reliable RF electrical energy transfer. The canted spring contact of the present invention allows for flat contact between the pedestal and the chuck.