Method and apparatus for treating perfluorocompound gas

Method and apparatus for treating perfluorocompound gas

In order to prevent exhaust pipe for exhausting perfluorocompound (PFC) decomposition gas after washing from corrosion, a mist separating apparatus (21; 30) is provided at a rear stage of the washing tower (13) for washing the PFC decomposition gas. The corrosion of the exhaust pipe can be prevented...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: TAMATA, SHIN, YUKITAKE, TSUGIHIRO, YAMASHITA, HISAO, MIYAMOTO, TOMOHIKO, KOMURO, TAKEO, KAWASAKI, TERUFUMI, SHIBANO, YOSHIKI, KANNO, SHUICHI
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOIDCHEMISTRY
PERFORMING OPERATIONS
PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
SEPARATION
THEIR RELEVANT APPARATUS
TRANSPORTING
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Beschreibung
Zusammenfassung:In order to prevent exhaust pipe for exhausting perfluorocompound (PFC) decomposition gas after washing from corrosion, a mist separating apparatus (21; 30) is provided at a rear stage of the washing tower (13) for washing the PFC decomposition gas. The corrosion of the exhaust pipe can be prevented by removing the mist from the washed gas.