Multiple sided robot blade for semiconductor processing equipment

The disclosure relates to a processing system (2) having a robot assembly (72) which includes a multiple sided robot blade (94) that can support a substrate on at least two sides (96) thereof and associated methods to transfer one or more substrates in a processing system. An unprocessed substrate c...

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Bibliographische Detailangaben
Hauptverfasser:	SHANMUGASUNDRAM, ARULKUMAR, KARAZIM, MICHAEL P
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS CHAMBERS PROVIDED WITH MANIPULATION DEVICES CONVEYING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HAND TOOLS HANDLING THIN OR FILAMENTARY MATERIAL MANIPULATORS PACKING PERFORMING OPERATIONS PNEUMATIC TUBE CONVEYORS PORTABLE POWER-DRIVEN TOOLS SEMICONDUCTOR DEVICES SHOP CONVEYOR SYSTEMS STORING TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING TRANSPORTING
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Beschreibung
Zusammenfassung:	The disclosure relates to a processing system (2) having a robot assembly (72) which includes a multiple sided robot blade (94) that can support a substrate on at least two sides (96) thereof and associated methods to transfer one or more substrates in a processing system. An unprocessed substrate can be supported on the blade while a processed substrate is retrieved from a location to which the unprocessed substrate is to be delivered. The processing throughput rate is increased by reducing the movements required by the robot to exchange processed substrates and unprocessed substrates, thus decreasing the swap time.