CATHODE STRUCTURE WITH GETTER MATERIAL AND DIAMOND FILM, AND METHODS OF MANUFACTURE THEREOF
A cathode structure comprising a getter material provided with a diamond film. The getter material may include zirconium, vanadium and iron. Cathode structures may have a substantially rounded configuration including a substantially straight portion. Other cathode structures may have a substantially...
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Sprache: | eng ; fre ; ger |
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Zusammenfassung: | A cathode structure comprising a getter material provided with a diamond film. The getter material may include zirconium, vanadium and iron. Cathode structures may have a substantially rounded configuration including a substantially straight portion. Other cathode structures may have a substantially flat portion, with the diamond film covering essentially the entire flat surface. Methods of manufacturing cathode structures may include conditioning the cathode structure by applying a voltage. |
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