CATHODE STRUCTURE WITH GETTER MATERIAL AND DIAMOND FILM, AND METHODS OF MANUFACTURE THEREOF

A cathode structure comprising a getter material provided with a diamond film. The getter material may include zirconium, vanadium and iron. Cathode structures may have a substantially rounded configuration including a substantially straight portion. Other cathode structures may have a substantially...

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Bibliographische Detailangaben
Hauptverfasser: CHORNENKY, VICTOR, I, KERSLICK, GRAHAM, S
Format: Patent
Sprache:eng ; fre ; ger
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Zusammenfassung:A cathode structure comprising a getter material provided with a diamond film. The getter material may include zirconium, vanadium and iron. Cathode structures may have a substantially rounded configuration including a substantially straight portion. Other cathode structures may have a substantially flat portion, with the diamond film covering essentially the entire flat surface. Methods of manufacturing cathode structures may include conditioning the cathode structure by applying a voltage.