CHARGED PARTICLE ANALYSIS
A detection device for analyzing charged particles. The charged particle analyzer comprises a source of charged particles and a charged particle detector spaced from the source and immersed within the source in an ionizable gas. The detector comprises at least one pair of electrodes, characterized i...
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Format: | Patent |
Sprache: | eng ; fre ; ger |
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Zusammenfassung: | A detection device for analyzing charged particles. The charged particle analyzer comprises a source of charged particles and a charged particle detector spaced from the source and immersed within the source in an ionizable gas. The detector comprises at least one pair of electrodes, characterized in that the electrodes of the pair are spaced apart by a distance that is substantialy less than the spacing between the source and detector. The electrodes of the pair are maintained at different potentials, and the source is maintained at a potential different from the potentials of the electrodes. The potentials are selected such that charged particles emitted by the source are attracted from the source toward each of the pair of electrodes and such that charged particles adjacent the detector are accelerated to energies sufficient to ionize the gas. |
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