Film forming equipment

The present invention relates to a film forming equipment for carrying out a method of forming a planarized interlayer insulating film to cover wiring layers, etc. of a semiconductor integrated circuit device. The film forming equipment comprises a first source supplying unit (21) for supplying a source of phosphorus-containing compound (33), a second source supplying unit (22) for supplying a source of silicon-containing compound (36), a third source supplying unit (23) for supplying a source of an oxidizing gas, a pressure-reducible film forming chamber (203) connected to respective source supplying units (21, 22, 23) for forming a film on a substrate (206) by activating source gases by heating or plasmanizing to react, and a pressure-reducible planarizing process chamber (204) connected to the film forming chamber (203) to enable shifting from film formation to a planarizing treatment without exposure of the substrate (206) to an atmospheric air, and having a heating means for fluidizing a formed film on the substrate (206) to planarize a surface of the formed film.