An elevated pin diode active pixel sensor including a unique interconnection structure

An active pixel sensor includes a substrate [40], an interconnect structure [43] adjacent to the substrate [40], and at least one photo sensor adjacent to the interconnect structure [43]. Each photo sensor includes an individual pixel electrode [44]. An I-layer [46] is formed over all of the pixel e...

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Bibliographische Detailangaben
Hauptverfasser: CAO, MIN, VOOK, DIETRICH W, RAY, GARY W, PERNER, FREDERICK A, SUN, XIN, THEIL, JEREMY A, MA, SHAWMING
Format: Patent
Sprache:eng ; fre ; ger
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Zusammenfassung:An active pixel sensor includes a substrate [40], an interconnect structure [43] adjacent to the substrate [40], and at least one photo sensor adjacent to the interconnect structure [43]. Each photo sensor includes an individual pixel electrode [44]. An I-layer [46] is formed over all of the pixel electrodes [44]. A transparent electrode [50] is formed over the I-layer [48]. An inner surface of the transparent electrode [50] is electrically connected to the I-layer [46] and the interconnect structure [43].