Apparatus for processing silicon devices with improved temperature control

Bibliographische Detailangaben

Hauptverfasser:	ALERS, GLENN B, LEVINE, BARRY FRANKLIN, FLEMING, ROBERT M, THOMAS, GORDON ALBERT
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MEASURING MEASURING QUANTITY OF HEAT MEASURING TEMPERATURE PHYSICS SEMICONDUCTOR DEVICES TESTING THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
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