PRODUCTION PROCESS FOR A MICROMECHANICAL BUILDING COMPONENT

Micromechanical component and a method for its production having vertically arranged layers made of metallic materials, with the layers adhering firmly to one another at least in part. The layers of the micromechanical component are attached to each other via intermediate layers, with the intermedia...

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Bibliographische Detailangaben
Hauptverfasser:	MAGENAU, HORST, GLOCK, ARMIN, JAUERNIG, ALEXANDRA, SCHITTNY, THOMAS, KRAUSS, ELKE, SCHATZ, FRANK, GLAS, RONALD
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	APPARATUS THEREFOR BASIC ELECTRIC ELEMENTS CHEMISTRY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRIC SWITCHES ELECTRICITY ELECTROFORMING ELECTROLYTIC OR ELECTROPHORETIC PROCESSES EMERGENCY PROTECTIVE DEVICES METALLURGY PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTIONOF COATINGS RELAYS SELECTORS SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	Micromechanical component and a method for its production having vertically arranged layers made of metallic materials, with the layers adhering firmly to one another at least in part. The layers of the micromechanical component are attached to each other via intermediate layers, with the intermediate layers being at least one sputtered layer which can be applied in the form of a metallic start plating to the underlying layer, which includes metallic and nonmetallic areas, and to which an upper metallic electroplated layer can be applied. Upon their completion, the layers yield the micromechanical component with layers that adhere to one another or layers which can be partially detached from one another.