Power semiconductor device module with submodules having integrated coolers

The module (1) has a number of sub-modules (2) with at least one semiconducting chip (3) attached to the top of an electrically insulating, heat conducting substrate (6) with a thermal expansion coefficient matching that of the chip. One sub-module (2) directly in the substrate has a cooler (7) of a...

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Bibliographische Detailangaben
Hauptverfasser: ETTER, PETER, STUCK, ALEXANDER, ZEHRINGER, RAYMOND
Format: Patent
Sprache:eng ; fre ; ger
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Zusammenfassung:The module (1) has a number of sub-modules (2) with at least one semiconducting chip (3) attached to the top of an electrically insulating, heat conducting substrate (6) with a thermal expansion coefficient matching that of the chip. One sub-module (2) directly in the substrate has a cooler (7) of a good thermal conductor. The cooler is embedded in the underside (6b) of the substrate.