Vacuum coating apparatus for all-round coating of substrates by rotation in the particle flux

The installation for coating substrates (3, 3') by rotating them in a particle stream (2) includes a vacuum chamber with a material source (13), a substrate holder (6) and its drive (10, 11, 21) to produce rotational and translational motion. The substrate holder is a hollow segmented arm (7, 8...

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Bibliographische Detailangaben
Hauptverfasser:	RICK, ALFRED, ANDERLE, FRIEDRICH, EBERHARDT, HELMUNT, BAEHR, MARTIN
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	The installation for coating substrates (3, 3') by rotating them in a particle stream (2) includes a vacuum chamber with a material source (13), a substrate holder (6) and its drive (10, 11, 21) to produce rotational and translational motion. The substrate holder is a hollow segmented arm (7, 8, 9) which is rotatable about and displaceable along the axis (l) of the segment (7). The substrate carrier tray (19) takes the form of the sun wheel (28) of a planetary gear unit, and is attached to a linked or flexible shaft (12) which is connected to a motor (21). The end of the hollow segment (9) is provided with toothed rim (29) meshing with planet gears (30, 30', ...) whose axles (31, 31'), are rigidly joined to substrate seating elements (32, 32', ...).