Process for producing polycrystalline semiconductor

A process and apparatus for producing a high-quality polycrystalline semiconductor ingot with excellent crystallographic properties are disclosed. The interior of an airtight vessel (1) is kept in an inert atmosphere for semiconductors. A raw semiconductor material (17) is charged in a crucible (9),...

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1. Verfasser: OKUNO, TETSUHIRO
Format: Patent
Sprache:eng ; fre ; ger
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