Method and apparatus for measuring the height of an object

A method and an apparatus for measuring the height of an apex of an object (601) with high accuracy without influence of the surface state of the object are disclosed. Correlation coefficients of respective positions of a waveform (102) formed from digital data indicative of the height of the object...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	SASAKI, HIDEAKI, KAZUI, SHINICHI, HASHIMOTO, YUTAKA
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS SEMICONDUCTOR DEVICES TESTING
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