Method and apparatus for measuring the height of an object

A method and an apparatus for measuring the height of an apex of an object (601) with high accuracy without influence of the surface state of the object are disclosed. Correlation coefficients of respective positions of a waveform (102) formed from digital data indicative of the height of the object...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	SASAKI, HIDEAKI, KAZUI, SHINICHI, HASHIMOTO, YUTAKA
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS SEMICONDUCTOR DEVICES TESTING
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Beschreibung
Zusammenfassung:	A method and an apparatus for measuring the height of an apex of an object (601) with high accuracy without influence of the surface state of the object are disclosed. Correlation coefficients of respective positions of a waveform (102) formed from digital data indicative of the height of the object detected by a head portion of a detector (603) and a previously prepared standard waveform (101) are calculated while moving the waveforms in the vertical and horizontal directions and the height of an apex position of the standard waveform at a position having a largest correlation coefficient from the calculated result is decided as the height of the apex of the object. Accordingly, the height of the apex can be decided from the whole detected waveforms without influence of local abnormality of the reflected light quantity waveform due to minute ruggedness or discoloration of the surface of the object.