HIGH PURITY COMPOSITE USEFUL AS FURNACE COMPONENTS

A Czochralski process furnace component comprises a high purity, semiconductor standard composite including a carbon fiber reinforced carbon matrix having a level of metal impurity below the detection limit of inductively coupled plasma spectroscopy. A process for producing the components includes h...

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Bibliographische Detailangaben
1. Verfasser: METTER, ROBERT, H
Format: Patent
Sprache:eng ; fre ; ger
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Zusammenfassung:A Czochralski process furnace component comprises a high purity, semiconductor standard composite including a carbon fiber reinforced carbon matrix having a level of metal impurity below the detection limit of inductively coupled plasma spectroscopy. A process for producing the components includes heat treatment of the carbon fiber and the components.