HIGH PURITY COMPOSITE USEFUL AS FURNACE COMPONENTS
A Czochralski process furnace component comprises a high purity, semiconductor standard composite including a carbon fiber reinforced carbon matrix having a level of metal impurity below the detection limit of inductively coupled plasma spectroscopy. A process for producing the components includes h...
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Format: | Patent |
Sprache: | eng ; fre ; ger |
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Zusammenfassung: | A Czochralski process furnace component comprises a high purity, semiconductor standard composite including a carbon fiber reinforced carbon matrix having a level of metal impurity below the detection limit of inductively coupled plasma spectroscopy. A process for producing the components includes heat treatment of the carbon fiber and the components. |
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