Dip coating apparatus having a single coating vessel

There is disclosed a dip coating apparatus including: (a) a single coating vessel (4) capable of containing a batch of substrates (12) vertically positioned in the vessel (4), wherein there is absent vessel walls defining a separate compartment for each of the substrates (12); (b) a coating solution...

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Bibliographische Detailangaben
Hauptverfasser: FOLEY, GEOFFREY M.T, THOMAS, MARK S, PIETRZYKOWSKI, STANLEY J., JR, MILLONZI, RICHARD P, SWAIN, EUGENE A, SCHMITT, PETER J, FOLTZ, ROBERT S, PETROPOULOS, MARK C, KILMER, DAVID J
Format: Patent
Sprache:eng ; fre ; ger
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Zusammenfassung:There is disclosed a dip coating apparatus including: (a) a single coating vessel (4) capable of containing a batch of substrates (12) vertically positioned in the vessel (4), wherein there is absent vessel walls defining a separate compartment for each of the substrates (12); (b) a coating solution disposed in the vessel (4), wherein the solution is comprised of photosensitive materials and including a solvent that gives off a solvent vapor; and (c) a solvent vapor uniformity control apparatus (22) which minimizes any difference in solvent vapor concentration encountered by the batch of the substrates (12) in the air adjacent the solution surface, thereby improving coating uniformity of the substrates (12).