X-RAY SOURCE WITH FLEXIBLE PROBE

This invention is directed to an x-ray source comprising a housing (12), a power supply (12A), an elongated tubular probe (14), a target assembly (26), and a beam steering assembly (29). The housing encloses an electron beam source (22), and has elements for generating an electron beam along a beam path. The power supply (12A) is programmable to control the voltage, current and timing of assembly (26) extends along the central axis and is adapted for coupling to end of the probe (14) distal from the housing (12). The target assembly (26) includes target element (26A) positioned along the beam path, wherein the target element (26A) is adapted to emit x-rays in a predetermined spectral range in response to incident electrons. The beam steering assembly (29) includes a deflection element (30), a feedback network (31) and a deflection controller (144). The deflection element (30) deflects the beam from a nominal axis to a selected surface region on the target element (26) in response to a deflection control signal. The feedback network (31) includes deflection sensing elements for sensing the deflection of the beam and elements for generating feedback signal representative thereof.