Device for in situ measurement of stress in films

The system, for measuring the deformation of the substrate under test, has an inner housing supplied with a cooling medium through supply lines. The essential components of the optical distance measuring unit are arranged in the inner housing. The inner housing has electrically conducting material a...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	DAAUD, SIMONE, LUETHJE, HOLGER
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS COLORIMETRY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT MEASURING MEASURING ANGLES MEASURING AREAS MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS RADIATION PYROMETRY SEMICONDUCTOR DEVICES TESTING
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Beschreibung
Zusammenfassung:	The system, for measuring the deformation of the substrate under test, has an inner housing supplied with a cooling medium through supply lines. The essential components of the optical distance measuring unit are arranged in the inner housing. The inner housing has electrically conducting material and lies at earth potential. A temp. sensor is provided in the inner housing. A regulating circuit regulates the cooling medium in such a manner that a specified temp. is held in the inner housing.