Semiconductor device having capacitor

A semiconductor device forming a capacitor through an interlayer insulating layer on a semiconductor substrate on which an integrated circuit is formed. This semiconductor device has an interlayer insulating layer, which covers the capacitor, and has a passivation layer which covers the interconnect...

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Bibliographische Detailangaben
Hauptverfasser: FUJII, EIJI, INOUE, ATSU, MATSUDA, AKIHIRO, SHIMADA, YASUHIRO, UEMOTO, YASUHIRO, OTSUKI, TATSUO, NASU, TORU, MATSUURA, TAKETOSHI, NAGANO, YOSHIHISA, ARITA, KOJI
Format: Patent
Sprache:eng ; fre ; ger
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