Loading and unloading station for semiconductor treatment installations

The station has a lockable charging or loading opening (13). After removing a closure from this opening (13), disk type objects in a transport container (6) are loaded. The transport container (6) is provided with a cover (15). The latter is aligned perpendicular to the plane of loading. The transpo...

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Bibliographische Detailangaben
Hauptverfasser:	SCHELER, WERNER, BLASCHITZ, HERBERT, SCHULZ, ALFRED, MAGES, ANDREAS, SCHNEIDER, HEINZ
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR BASIC ELECTRIC ELEMENTS CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS,e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES,DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS CONVEYING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HANDLING THIN OR FILAMENTARY MATERIAL PACKAGES PACKAGING ELEMENTS PACKING PERFORMING OPERATIONS PNEUMATIC TUBE CONVEYORS SEMICONDUCTOR DEVICES SHOP CONVEYOR SYSTEMS STORING TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING TRANSPORTING
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Beschreibung
Zusammenfassung:	The station has a lockable charging or loading opening (13). After removing a closure from this opening (13), disk type objects in a transport container (6) are loaded. The transport container (6) is provided with a cover (15). The latter is aligned perpendicular to the plane of loading. The transport container (6) is fixedly coupled to the cover (15 with the closure (12)) by force locking, for loading the disk type objects. The opening (13) and the transport container (6) are opened simultaneously by lifting the cover (15) and the closure (12) together. The loading is connected with forcing a handling device in the installation through the opening in the transport container (6).