Mounting apparatus for cryogenic aerosol cleaning

An apparatus (10) for mounting to a tool (105) having a surface (20) to be cleaned for producing aerosol from a substance for cleaning the surface (20), includes a flange (130) for mounting to the tool (105) having the surface (20) to be cleaned. A nozzle (102) is mounted to the flange (130) for receiving the substance. The nozzle (102) has at least one exit opening (165) which allows passing of the substance therethrough for expanding the substance from a first pressure to a second pressure which is lower than the first pressure for solidifying at least a substantial portion of the substance and producing aerosol for cleaning the surface (20). Condensation preventing means (115,125) is provided for preventing condensation from forming on surfaces (45) of the apparatus and the surface (20) to be cleaned, and contamination preventing means (115) is provided for preventing contaminants from re-contaminating the surface (20) subsequent to removal therefrom.