MICROVALVE

MICROVALVE

PCT No. PCT/DE93/00493 Sec. 371 Date Dec. 16, 1994 Sec. 102(e) Date Dec. 16, 1994 PCT Filed Jun. 8, 1993 PCT Pub. No. WO94/00696 PCT Pub. Date Jan. 6, 1994The microvalve according to the invention is composed in a layered manner of at least one bottom part (11), one middle part (12) and one top part...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: METTNER, MICHAEL, SCHITTNY, THOMAS, DOERING, CHRISTIAN, SCHUELKE, ARMIN
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
ACTUATING-FLOATS
BLASTING
COCKS
DEVICES FOR VENTING OR AERATING
ENGINEERING ELEMENTS AND UNITS
FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING ORCONTROL PURPOSES
FLUID-PRESSURE ACTUATORS
GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS
HEATING
HYDRAULICS OR PNEUMATICS IN GENERAL
LIGHTING
MECHANICAL ENGINEERING
TAPS
THERMAL INSULATION IN GENERAL
VALVES
WEAPONS
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Zusammenfassung:PCT No. PCT/DE93/00493 Sec. 371 Date Dec. 16, 1994 Sec. 102(e) Date Dec. 16, 1994 PCT Filed Jun. 8, 1993 PCT Pub. No. WO94/00696 PCT Pub. Date Jan. 6, 1994The microvalve according to the invention is composed in a layered manner of at least one bottom part (11), one middle part (12) and one top part (13). The sealing ring (31) (closure member), the valve plate (29) (pressure-compensating surface) and the membrane (26) are integrated in the middle part (12), this integral component being manufactured by a plastic moulding process. The actuation of the valve takes place using an electrical operating apparatus, for example by an electrostatic drive, an electromagnetic or a piezoelectric drive. In particular in the case of the electrostatic drive, two electrodes (17, 22) are applied in a layered manner to the middle part (12) or the bottom part (11). The bottom part, middle part and top part are joined together and connected, for example bonded or welded, permanently to one another.