Method of forming Si-O containing coatings

A coating contg. Si-O is formed on an electronic substrate by a method comprising: (i) coating the substrate with hydrogen silsesquioxane resin, and (ii) converting the coating to a Si-O-contg. ceramic by pyrolysing in an atmos. to which H2 is introduced during the conversion. The resin comprises at...

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Bibliographische Detailangaben
Hauptverfasser:	BALLANCE, DAVID STEPHEN, MICHAEL, KEITH WINTON
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	ADHESIVES ARTIFICIAL STONE BASIC ELECTRIC ELEMENTS CEMENTS CERAMICS CHEMICAL PAINT OR INK REMOVERS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING COMPOSITIONS, e.g. PAINTS, VARNISHES ORLACQUERS COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL COMPOSITIONS BASED THEREON COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDINGMATERIALS COMPOUNDS THEREOF CONCRETE CORRECTING FLUIDS DIFFUSION TREATMENT OF METALLIC MATERIAL DYES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FILLING PASTES INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL INKS INORGANIC CHEMISTRY LIME, MAGNESIA MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONSONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS METALLURGY MISCELLANEOUS APPLICATIONS OF MATERIALS MISCELLANEOUS COMPOSITIONS NATURAL RESINS NON-METALLIC ELEMENTS ORGANIC MACROMOLECULAR COMPOUNDS PAINTS PASTES OR SOLIDS FOR COLOURING OR PRINTING POLISHES REFRACTORIES SEMICONDUCTOR DEVICES SLAG SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION THEIR PREPARATION OR CHEMICAL WORKING-UP TREATMENT OF NATURAL STONE USE OF MATERIALS THEREFOR WOODSTAINS
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Beschreibung
Zusammenfassung:	A coating contg. Si-O is formed on an electronic substrate by a method comprising: (i) coating the substrate with hydrogen silsesquioxane resin, and (ii) converting the coating to a Si-O-contg. ceramic by pyrolysing in an atmos. to which H2 is introduced during the conversion. The resin comprises at least 75% polymeric species of 1200-100,000 MW and is applied as a soln. from which the solvent is then evapd. The substrate is heated at 50-1000 deg.C for less than 6 hr. The atmos. contains air, O2, oxygen plasma, O3, an inert gas, ammonia, amines, moisture or N2O, and the H2 content is 1-30 vol.% and is esp. 5 vol.% max. The resin contains a modifying ceramic oxide precursor comprising a Ti, Zr, Al, Ta, V, Nb, B or P cpd. contg. a hydrolysable alkoxy or acyloxy group; the ceramic oxide is 0.1-30% of the SiO2 coating. The coating also contains 5-1000 ppm Pt, Rh or Cu catalyst.