Method of polishing a surface of copper or an alloy comprising mainly copper

Method of polishing a surface (5a) of copper or an alloy comprising mainly copper, in which a polishing means is moved across the surface while exerting a polishing pressure of approximately 500 g/cm for obtaining a plane and smooth polished surface without any defects. A composition of a polishing...

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Bibliographische Detailangaben
Hauptverfasser: DE BOER, DIRK KORNELIS GERHARDUS, VAN DEN HOOGENHOF, WALTERUS WILHELMUS, POSTMA, LAMBERTUS, HAISMA, JAN, DE HAAS, PETER WILHELMUS
Format: Patent
Sprache:eng ; fre ; ger
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Zusammenfassung:Method of polishing a surface (5a) of copper or an alloy comprising mainly copper, in which a polishing means is moved across the surface while exerting a polishing pressure of approximately 500 g/cm for obtaining a plane and smooth polished surface without any defects. A composition of a polishing component comprising a colloidal suspension of SiO2 particles having an average particle size of between 20 and 50 nm in an alkali solution, demineralised water and a chemical activator is used as a polishing means.