Multiple-metal-level integrated device and fabrication process thereof

An integrated device (1) comprising two metal levels (6, 8) separated by a layer of insulating material (3) and connected (10) electrically at respective contact pads (5, 7) located one over the other. The two pads (5, 7) are connected electrically by a number of parallel contact regions (10) having...

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Hauptverfasser: CAPRILE, CANDIDA, DE SANTI, GIORGIO
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Sprache:eng ; fre ; ger
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creator CAPRILE, CANDIDA
DE SANTI, GIORGIO
description An integrated device (1) comprising two metal levels (6, 8) separated by a layer of insulating material (3) and connected (10) electrically at respective contact pads (5, 7) located one over the other. The two pads (5, 7) are connected electrically by a number of parallel contact regions (10) having a much smaller cross sectional area as compared with the contact pads (5, 7). The contact regions (10) are so formed as to terminate close to the side of the lower contact pad (5) from which a respective metal line (4) extends, and are covered by the final passivation layer (12).
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language eng ; fre ; ger
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subjects BASIC ELECTRIC ELEMENTS
CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
PRINTED CIRCUITS
SEMICONDUCTOR DEVICES
title Multiple-metal-level integrated device and fabrication process thereof
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