Microstructure for vibratory gyroscope

A microstructure for a vibratory gyroscope has a ring portion (14) supported so as to allow substantially undamped, high-Q radial vibration. The ring portion (14) is electrically conductive and comprises a charge plate (14) for a plurality of radially disposed charge conductive sites (13) around its...

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Bibliographische Detailangaben
Hauptverfasser:	PUTTY, MICHAEL WILLIAM, EDDY, DAVID STURGE
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL GYROSCOPIC INSTRUMENTS INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL MEASURING MEASURING DISTANCES, LEVELS OR BEARINGS METALLURGY MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY NAVIGATION PERFORMING OPERATIONS PHOTOGRAMMETRY OR VIDEOGRAMMETRY PHYSICS PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION SURVEYING TESTING TRANSPORTING
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Beschreibung
Zusammenfassung:	A microstructure for a vibratory gyroscope has a ring portion (14) supported so as to allow substantially undamped, high-Q radial vibration. The ring portion (14) is electrically conductive and comprises a charge plate (14) for a plurality of radially disposed charge conductive sites (13) around its perimeter for sensing radial displacements thereof. The ring (14), its support (15) and charge conductive sites (13) are formed within sacrificial moulds on one surface of a conventional silicon substrate which may comprise a monolithic integrated circuit.