Method of chemically modifying a surface in accordance with a pattern

Method of chemically modifying a surface in accordance with a pattern

Oxidic surfaces can be pattern-wise chemically modified by providing one or several monolayers of a photosensitive silane. After pattern-wise exposure of said photosensitive silane, the exposed parts are esterified with an alcohol which comprises at least one fluorine atom, so that said exposed area...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: CAMPS, IVO GODFRIED JOZEF, WILLARD, NICOLAAS PETRUS
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
APPARATUS SPECIALLY ADAPTED THEREFOR
CINEMATOGRAPHY
ELECTROGRAPHY
HOLOGRAPHY
MATERIALS THEREFOR
ORIGINALS THEREFOR
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
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Beschreibung
Zusammenfassung:Oxidic surfaces can be pattern-wise chemically modified by providing one or several monolayers of a photosensitive silane. After pattern-wise exposure of said photosensitive silane, the exposed parts are esterified with an alcohol which comprises at least one fluorine atom, so that said exposed areas become strongly hydrophobic. Subsequently, the unexposed areas are exposed, so that these areas become hydrophilic. The hydrophilic areas can then be metallized in an electroless process, thereby forming a metal pattern.