Emitter gun assembly

Emitter gun assembly

An emitter gun for an electron beam in an evaporation apparatus used in semiconductor processing is improved by: the addition of insulating material that eliminates short circuits caused by the lodging of particles between high voltage electrodes carrying RF voltage and provides for the vaporization...

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Hauptverfasser: HOLIHAN, JAMES EDWIN, POWELEIT,HELMUT RUDOLF, CARBONNE, QUIEDO JOSEPH, SLISS,GERALD JOSEPH
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
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creator HOLIHAN, JAMES EDWIN
POWELEIT,HELMUT RUDOLF
CARBONNE, QUIEDO JOSEPH
SLISS,GERALD JOSEPH
description An emitter gun for an electron beam in an evaporation apparatus used in semiconductor processing is improved by: the addition of insulating material that eliminates short circuits caused by the lodging of particles between high voltage electrodes carrying RF voltage and provides for the vaporization of the particles by eddy current heating without damage to the insulator, so that downtime due to short circuits in the emitter gun is eliminated; and by mechanical improvements that increase the gap between the beam former and the anode and that eliminate cracked ceramic insulators.
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language eng ; fre ; ger
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
title Emitter gun assembly
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