Emitter gun assembly
An emitter gun for an electron beam in an evaporation apparatus used in semiconductor processing is improved by: the addition of insulating material that eliminates short circuits caused by the lodging of particles between high voltage electrodes carrying RF voltage and provides for the vaporization...
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| Hauptverfasser: | , , , |
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| Format: | Patent |
| Sprache: | eng ; fre ; ger |
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| Zusammenfassung: | An emitter gun for an electron beam in an evaporation apparatus used in semiconductor processing is improved by: the addition of insulating material that eliminates short circuits caused by the lodging of particles between high voltage electrodes carrying RF voltage and provides for the vaporization of the particles by eddy current heating without damage to the insulator, so that downtime due to short circuits in the emitter gun is eliminated; and by mechanical improvements that increase the gap between the beam former and the anode and that eliminate cracked ceramic insulators. |
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