SEMICONDUCTOR SENSOR AND ITS MANUFACTURING METHOD

A high sensitivity semiconductor sensor with a good temperature characteristic comprising a sensor layer of a thin film made of InxGa1-xAsySb1-y(O < x

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	NAGASE, KAZUHIRO, SHIBASAKI, ICHIRO, IWABUCHI, TATSURO, KUZE, NAOHIRO
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	A high sensitivity semiconductor sensor with a good temperature characteristic comprising a sensor layer of a thin film made of InxGa1-xAsySb1-y(O < x