PROCESS FOR PRODUCING OPTICAL COATINGS INCLUDING NIOBIUM OXIDE BY DC IN-LINE REACTIVE SPUTTERING

A multilayer optical coating including at least one layer of niobium oxide deposited by DC reactive sputtering.

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Bibliographische Detailangaben
Hauptverfasser: DICKEY, ERIC, R, STEFFENHAGEN, DEBRA, M
Format: Patent
Sprache:eng ; fre ; ger
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Beschreibung
Zusammenfassung:A multilayer optical coating including at least one layer of niobium oxide deposited by DC reactive sputtering.