PROCESS FOR PRODUCING OPTICAL COATINGS INCLUDING NIOBIUM OXIDE BY DC IN-LINE REACTIVE SPUTTERING
A multilayer optical coating including at least one layer of niobium oxide deposited by DC reactive sputtering.
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Format: | Patent |
Sprache: | eng ; fre ; ger |
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Zusammenfassung: | A multilayer optical coating including at least one layer of niobium oxide deposited by DC reactive sputtering. |
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