Planetary transmission with a gear set, in particular for devices for coating substrates

Planetary gear system including one set of gearwheels 11, in particular for devices for coating substrates 3, 3', . . . in a high-vacuum coating chamber where a drive shaft 9 supported and guided in a stationary bearing 1A is provided with a radially extending carrier plate 10 for planets and w...

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Bibliographische Detailangaben
Hauptverfasser:	WIRTH, ECKHARD, LOCHER, STEFAN
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BLASTING CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ENGINEERING ELEMENTS AND UNITS GEARING GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS HEATING INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL LIGHTING MECHANICAL ENGINEERING METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION THERMAL INSULATION IN GENERAL WEAPONS
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Beschreibung
Zusammenfassung:	Planetary gear system including one set of gearwheels 11, in particular for devices for coating substrates 3, 3', . . . in a high-vacuum coating chamber where a drive shaft 9 supported and guided in a stationary bearing 1A is provided with a radially extending carrier plate 10 for planets and where the main axis of the stationary sun gear 8 coincides with the rotating axis of the drive shaft 9 and engages the set of gearwheels, wherein the bearing cage, which includes a top plate 27 and a bottom plate 28, via an axis 23 extending parallel to the rotating axis, engages an opening 16, the latter being provided in an area which is located radially inside the carrier plate 10 and wherein the drive shaft 26 of the set of gearwheels 11 is supported and guided in a slot 17 which is in area radially on the outside of the carrier plate 10 and emerges out of the carrier plate 10 parallel tot he rotating axis.