Method for suppression of electrification

Electrification is suppressed with a water-soluble electrification-suppressing film having an electron conductivity and comprising a polymer resin. A high electrification-suppressing effect which is also high in vacuum can be easily obtained by using the electrification-suppressing film with less co...

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Bibliographische Detailangaben
Hauptverfasser: TAKASHI, RYUMA, SUZUKI, YASUNORI, MURAI, FUMIO, IKENOUE, YOSHIAKI, TOMOZAWA, HIDEKI, SAIDA, YOSHIHIRO
Format: Patent
Sprache:eng ; fre ; ger
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Zusammenfassung:Electrification is suppressed with a water-soluble electrification-suppressing film having an electron conductivity and comprising a polymer resin. A high electrification-suppressing effect which is also high in vacuum can be easily obtained by using the electrification-suppressing film with less contamination.