Fast cycle cryogenic flex probe

An elongated fast cycle cryopump device connected to a refrigerant source has a rigid head section adapted to extend through a pass-through opening of a vacuum chamber. The head end section has a feed tube and a return flow passage, the feed tube being connected to a valve for selectively receiving either a relatively cold refrigerant or a relatively hot refrigerant during different phases of operation. A flexible probe section connected to the rigid head end section is capable of being shaped in different ways to assume a preselected or variable configuration within the vacuum chamber workspace and includes a flexible feed tube connected to the feed tube of the head end section for carrying the refrigerants passing through the head section outwardly to the end of the flexible probe section. A flexible outer tubular member surrounding the flexible feed tube provides a return passage for the refrigerants along the flexible probe section and through the head section. When cold refrigerant flows in the flexible probe section during a vacuum cycle within a chamber, water vapor is condensed on its outer surface, and at the end of the cycle when hot refrigerant is flowing in the probe, condensed water vapor is released from the flexible probe section to the surrounding atmosphere.