Vibration/acceleration sensor
Disclosed is a vibration/acceleration sensor of a structure wherein a basic sensor unit is fixed to a casing (8) mounted on a body whose vibrations are to be detected and is surrounded by a resinous material (7) having a low heat transfer coefficient, the basic sensor unit comprising a vibration det...
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Format: | Patent |
Sprache: | eng ; fre ; ger |
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Zusammenfassung: | Disclosed is a vibration/acceleration sensor of a structure wherein a basic sensor unit is fixed to a casing (8) mounted on a body whose vibrations are to be detected and is surrounded by a resinous material (7) having a low heat transfer coefficient, the basic sensor unit comprising a vibration detecting unit (3) including a piezoelectric bending vibrator (11), thin plates (4) each consisting of, for example, a resinous material having a low heat transfer coefficient, provided respectively on the upper and lower surfaces of the vibration detecting unit (3), and a signal processing circuitry (5) formed on the upper thin plate (4a). |
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