Laminated silicon oxide film capacitors and method for their production
A laminated silicon oxide film capacitor comprising a conductive or semiconductive silicon substrate (31, 41) and, formed on the substrate surface, at least one laminated film comprising a silicon oxide layer (33, 43) and an electrode layer (32, 44) laminated one on the other, and electrodes (32A, 3...
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| creator | SAKAI, NAOMICHI KUBOTA, YOSHITAKA YAMAMURA, HIROSHI NAGATA, HIROYA KIKUSAWA, MASANAGA |
| description | A laminated silicon oxide film capacitor comprising a conductive or semiconductive silicon substrate (31, 41) and, formed on the substrate surface, at least one laminated film comprising a silicon oxide layer (33, 43) and an electrode layer (32, 44) laminated one on the other, and electrodes (32A, 32B, 32C, 46A, 46B). |
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| subjects | BASIC ELECTRIC ELEMENTS CAPACITORS CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES ORLIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES |
| title | Laminated silicon oxide film capacitors and method for their production |
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