Laminated silicon oxide film capacitors and method for their production

Laminated silicon oxide film capacitors and method for their production

A laminated silicon oxide film capacitor comprising a conductive or semiconductive silicon substrate (31, 41) and, formed on the substrate surface, at least one laminated film comprising a silicon oxide layer (33, 43) and an electrode layer (32, 44) laminated one on the other, and electrodes (32A, 3...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: SAKAI, NAOMICHI, KUBOTA, YOSHITAKA, YAMAMURA, HIROSHI, NAGATA, HIROYA, KIKUSAWA, MASANAGA
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
BASIC ELECTRIC ELEMENTS
CAPACITORS
CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES ORLIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:A laminated silicon oxide film capacitor comprising a conductive or semiconductive silicon substrate (31, 41) and, formed on the substrate surface, at least one laminated film comprising a silicon oxide layer (33, 43) and an electrode layer (32, 44) laminated one on the other, and electrodes (32A, 32B, 32C, 46A, 46B).