SYSTEM FOR CONTROLLING THE AMOUNT OF SUBSTITUTING LASER GAS

A laser gas in a discharge tube (51) is substituted by an exhaust pump (7) maintaining a predetermined substitution quantity for a predetermined period of time immediately after the excitation. In the subsequent period of operation, the laser gas is substituted at a rate smaller than the predtermine...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	IRIE, MICHIAKI, FANUC DAI 3-BIRA KARAMATSU, IEHISA, NOBUAKI, FANUC MANSION HARIMONI 7-304, YAMAZAKI, ETSUO
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS DEVICES USING STIMULATED EMISSION ELECTRICITY
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!