Micromagnetometer with flexible bar
The invention concerns a micromagnetometer consisting of at least one cantilever beam (2), a principal surface of which carries part of a winding (3) formed by a metallisation and a principal surface of which carries a piezoresistive stress-detection means (4).
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| Hauptverfasser: | , , , |
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| Format: | Patent |
| Sprache: | eng ; fre ; ger |
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| Online-Zugang: | Volltext bestellen |
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| Zusammenfassung: | The invention concerns a micromagnetometer consisting of at least one cantilever beam (2), a principal surface of which carries part of a winding (3) formed by a metallisation and a principal surface of which carries a piezoresistive stress-detection means (4). |
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