CAPACITIVE ACCELEROMETER WITH SEPARABLE DAMPING AND SENSITIVITY

A micromachined three-plate capacitive accelerometer incorporates hinges (162,164) attached to top and bottom surfaces of the proof mass (110) that are symmetric about X and Y axes (270,220) and also about diagonal axes (240,250); passageways (42) for gas film damping in the fixed members (30) that...

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Bibliographische Detailangaben
Hauptverfasser:	GRANTHAM, DANIEL H, BULLIS, ROBERT H, SWARTS, RICHARD E, WIEGAND, WALTER J, LOPICCOLO, MARIO T, SWINDAL, JAMES L, FOYT, ARTHUR G
Format:	Patent
Sprache:	eng
Schlagworte:	INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT MEASURING MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK PHYSICS TESTING
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Beschreibung
Zusammenfassung:	A micromachined three-plate capacitive accelerometer incorporates hinges (162,164) attached to top and bottom surfaces of the proof mass (110) that are symmetric about X and Y axes (270,220) and also about diagonal axes (240,250); passageways (42) for gas film damping in the fixed members (30) that do not affect the capacitance to any significant degree; and provision for independently selecting two of the parameters sensitivity, capacitance and maximum acceleration.