Localized vacuum apparatus and method

Apparatus (10) generates a localized, non-contact vacuum seal at a selected process region (15) of a workpiece surface (13) and includes a vacuum body (42) with a workpiece-facing surface (44) having a plurality of concentric grooves (46a-d) and a central bore (52) through which a process energy bea...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	EDWARDS, DAVID, JR, GUARINO, NICHOLAS, ECONOMOU, NICHOLAS P
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOIDCHEMISTRY CHEMICAL SURFACE TREATMENT CHEMISTRY CINEMATOGRAPHY CLADDING OR PLATING BY SOLDERING OR WELDING COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY ELECTROGRAPHY HOLOGRAPHY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL MACHINE TOOLS MATERIALS THEREFOR METAL-WORKING NOT OTHERWISE PROVIDED FOR METALLURGY ORIGINALS THEREFOR PERFORMING OPERATIONS PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL PHYSICS SOLDERING OR UNSOLDERING SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION THEIR RELEVANT APPARATUS TRANSPORTING WELDING WORKING BY LASER BEAM
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	Apparatus (10) generates a localized, non-contact vacuum seal at a selected process region (15) of a workpiece surface (13) and includes a vacuum body (42) with a workpiece-facing surface (44) having a plurality of concentric grooves (46a-d) and a central bore (52) through which a process energy beam (17) can be transmitted. The method of generating a localized vacuum seal includes placing the vacuum body (42) into selected proximity with the process region (15) of the workpiece surface (13), and differentially evacuating the grooves (46b-d), thereby defining differentially pumped vacuum chambers which reduce the influx of atmospheric particles to the process region (15). A selected control gas from source (24) is introduced into a vacuum body groove (46a) to further reduce the influx of atmospheric particles to the process region (15), and selected process gases can be introduced into the vacuum body (42) to react with the process beam (17).