FLOW METER

A flow sensor has a flow passage 4, a rectifying element such as a plurality of screens 2 or a honeycomb structure 8, arranged in the flow passage, a flow passage reducer 3 for reducing the flow passage behind the rectifying element, and a thermal flow sensor 1 mounted at a location immediately behi...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: KAMIUNTEN, SHOJI, AOSHIMA, SHIGERU, OCHIAI, KOUICHI, INABA, TAKASHI, TSUMURA, TAKASHI
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A flow sensor has a flow passage 4, a rectifying element such as a plurality of screens 2 or a honeycomb structure 8, arranged in the flow passage, a flow passage reducer 3 for reducing the flow passage behind the rectifying element, and a thermal flow sensor 1 mounted at a location immediately behind the reducer. This structure can largely reduce disturbance in flow to thereby enable highly accurate measurements of a wide range of flow without a low pass filter.