QUINONE DIAZIDES

The invention relates to desensitized quinone diazide compounds for use as photoactive components in radiation-sensitive compositions, such as, especially, photoresists, which compounds contain microcrystalline cellulose as desensitizing agent.

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Bibliographische Detailangaben
Hauptverfasser: DRESELY, STEFAN, RAULIN, DITMAR
Format: Patent
Sprache:eng ; ger
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Beschreibung
Zusammenfassung:The invention relates to desensitized quinone diazide compounds for use as photoactive components in radiation-sensitive compositions, such as, especially, photoresists, which compounds contain microcrystalline cellulose as desensitizing agent.