METHOD AND APPARATUS FOR THE CONTACTLESS MEASURING AND OPTIONALLY MACHINING OF SURFACES

The invention concerns methods for the non-contacting measuring and, if necessary, abrasive machining of surfaces, in particular of large-surface mirrors or the like, with which, for determining contour deviations of the surface, the difference between interferometrically detected surface contour actual values and preselected surface contour desired values is determined. In accordance with the invention, measured interferometrically relative to a standard is a reference contour of at least one reference element, the extension of which corresponds essentially to a measuring and, if necessary, a machining region of a surface, the geometry of which is known to within the allowable contour tolerance of the surface. The surface to be measured is brought into a defined spatial location relative to the reference element, the separation of the reference contour from the measuring and/or machining region of the surface being detected incrementally by interferometric means, and the relative difference between actual and desired value is determined. Undertaken for the machining, if necessary, is a removal of material from the surface, the amount of which does not exceed the allowable contour tolerance. Additionally, the invention concerns contrivances for carrying out these methods.