EQUIPMENT AND METHOD FOR SUPPLY OF ORGANIC METAL COMPOUND

An equipment for providing a stable supply of feed gas of an organic metal compound at a constant or substantially constant concentration comprises a cylindrical vessel with an organic metal compound housed, an inlet tube for a carrier gas for vaporizing said organic metal compound, an outlet tube f...

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Bibliographische Detailangaben
Hauptverfasser:	HIAI, ATSUHIKO, WAKIMURA, KAZUO
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CABLES CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOIDCHEMISTRY CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL CONDUCTORS DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL INSULATORS METALLURGY PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING ORDIELECTRIC PROPERTIES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION THEIR RELEVANT APPARATUS TRANSPORTING
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Beschreibung
Zusammenfassung:	An equipment for providing a stable supply of feed gas of an organic metal compound at a constant or substantially constant concentration comprises a cylindrical vessel with an organic metal compound housed, an inlet tube for a carrier gas for vaporizing said organic metal compound, an outlet tube for letting out the carrier gas substantially saturated with the vaporized organic metal compound, a chamber provided in the lower part of the vessel which is connected to said carrier gas inlet tube, a packed bed of an organic metal compound formed above said chamber, and a partition with a plurality of pores between said chamber and said packed bed.